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XLA-100-X152

SMC
bp3_vacuum_equipment
High Vacuum Valve
XL Aluminum High Vacuum Angle Valve

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Company

SMC

Description

XLA-X152 - Aluminum High Vacuum Angle Valve/Normally Closed/Bellows Seal

Bill of material

XLA-100-X152

SIZE

Flange size

100

TYPE

Flange type

(-) KF (NW)

(D) K (DN)

DIRECTION

Indicator/Pilot port direction

(-) Flange side without indicator

(A) Flange side with indicator

(F) Left flange surface with indicator

(G) Rear flange surface with indicator

(J) Right flange surface with indicator

(K) Left flange surface without indicator

(L) Rear flange surface without indicator

(M) Right flange surface without indicator

TEMPERATURE

Temperature specifications/Heater

(-) 5 to 60 °C

(H0) 5 to 150 °C

(H4) 5 to 150 °C with 100 °C heater

(H5) 5 to 150 °C with 120 °C heater

AUTOSW

Auto switch type

(-) Without auto switch (Without built-in magnet)

M9// Without auto switch (With built-in magnet)

M9N Solid state-General-Grommet-Indicator light:Yes-3 wire (NPN)-In line

M9B Solid state-General-Grommet-Indicator light:Yes-2 wire-In line

M9P Solid state-General-Grommet-Indicator light:Yes-3 wire(PNP)-In line

A90 Reed-General-Grommet-Indicator light:No-2 wire-In line

A93 Reed-General-Grommet-Indicator light:Yes-2 wire-In line

LEAD

Lead wire length for Switch

N/A

NUMBER

Number of auto switches/Mouting position

(-) Without auto switch

SURFACE

Body surface treatment

(-) External: Hard anodized Internal: Raw material

(A) External: Hard anodized Internal: Oxalic acid anodized

SEAL

Seal materials

(-) Seal material: FKM, Compound no.: 1349-80

(N1) Seal material: EPDM, Compound no.: 2101-80

(P1) Seal material: Barrel Perfluoro®, Compound no.: 70W

(Q1) Seal material: Kalrez®, Compound no.: 4079

(R1) Seal material: Chemraz®, Compound no.: SS592

(R2) Chemraz®, Compound no.: SS630

(R3) Seal material: Chemraz®, Compound no.: SSE38

(S1) Seal material: VMQ, Compound no.: 1232-70

(T1) Seal material: FKM for Plasma, Compound no.: 3310-75

(U1) Seal material: ULTIC ARMOR®, Compound no.: UA4640

CHANGED

Part with changed seal material and leakage

(-) Internal: 1.3 x 10^-10 (FKM) External: 1.3 x 10^-11 (FKM)

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XLA-100-X152