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XLF-100

SMC Corporation
High Vacuum Equipment
High Vacuum Valves
XL Aluminum High Vacuum Angle Valve

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Company

SMC Corporation

Description

XLF - Aluminum High Vacuum Angle Valve/Normally Closed/O-ring Seal

Bill of material

XLF-100

SIZE

Flange size

100

TYPE

Flange type

(-) KF (NW)

(D) K (DN)

DIRECTION

Indicator/Acutuator port direction

(-) Flange side without indicator

(A) Flange side with indicator

(F) Left flange surface with indicator

(G) Rear flange surface with indicator

(J) Right flange surface with indicator

(K) Left flange surface without indicator

(L) Rear flange surface without indicator

(M) Right flange surface without indicator

TEMPERATURE

Temperature specifications/Heater

(-) 5 to 60 °C

(H0) 5 to 150 °C

(H4) 5 to 150 °C with 100 °C heater

(H5) 5 to 150 °C with 120 °C heater

AUTOSW

Auto switch type

(-) Without auto switch (Without built-in magnet)

M9// Without auto switch (With built-in magnet)

M9N Solid state-General-Grommet-Indicator light: Yes-3 wire (NPN)-In line

M9B Solid state-General-Grommet-Indicator light: Yes-2 wire-In line

M9P Solid state-General-Grommet-Indicator light: Yes-3 wire (PNP)-In line

A90 Reed-General-Grommet-Indicator light: No-2 wire-In line

A93 Reed-General-Grommet-Indicator light: Yes-2 wire-In line

LEN

Lead wire length for Switch

N/A

Number of auto switches/Mouting position

(-) Without auto switch

SURFACE

Body surface treatment

(-) External: Hard anodized Internal: Raw material

(A) External: Hard anodized Internal: Oxalic acid anodized

SEAL

Seal materials

(-) FKM 1349-80

(N1) EPDM 2101-80

(P1) Barrel Perfluoro® 70W

(Q1) Kalrez® 4079

(R1) Chemraz® SS592

(R2) Chemraz® SS630

(R3) Chemraz® SSE38

(S1) VMQ 1232-70

(T1) FKM for Plasma 3310-75

(U1) ULTIC ARMOR® UA4640

(F1) FKM

CHANGE

Seal material changed part and leakage

(-) Internal: 1.3 x 10^-10 (FKM) External: 1.3 x 10^-10 (FKM)

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XLF-100